(A) Capacitance and dielectric measurements:HP 4284A Precision LCR meter operating at 20 Hz ~ 1 MHz measures capacitance and dielectric properties.
(B) Current-Voltage measurements:Keithley 6517A Electrometer/High Resistance Meter.
(C, D) Ferroelectricity measurements:Ferroelectric characterization is performed by two tools that can perform ferroelectric hysteresis, retention, and fatigue tests. As shown above, they are Precision LC by Radiant Technologies. Inc: operating at 1 Hz - 2 kHz and Precision FH100 by Radiant Technologies. Inc: operating at 1kHz -1MHz.
(E) Keithley 4200-SCS.performs electrical characterization of materials, semiconductor devices and processes. From basic I-V and C-V measurement sweeps to advanced ultra-fast pulsed I-V, waveform capture, and transient I-V measurements
(F) Probe Station with microscope. The microscope is equipped with a Moticam digital sensor for capturing images of samples.
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